Authors: James Parker a
a CPFD Software
Source: Internal Whitepaper, 2011
Description: The production of trichlorosilane (TCS) in a fluidized bed reactor is a widely used process in the polysilicon industry. In many industrial plants, the production of TCS is the first step in producing high-purity polysilicon from metallurgical grade silicon (MGS). In this reactor, solid MGS particles are fluidized by hydrogen chloride gas which reacts to form primarily TCS and hydrogen gas. Silicon tetrachloride, dichlorosilane, and some longer-chain chlorosilanes are produced as byproducts in side reactions.